JPH0473434U - - Google Patents

Info

Publication number
JPH0473434U
JPH0473434U JP11504490U JP11504490U JPH0473434U JP H0473434 U JPH0473434 U JP H0473434U JP 11504490 U JP11504490 U JP 11504490U JP 11504490 U JP11504490 U JP 11504490U JP H0473434 U JPH0473434 U JP H0473434U
Authority
JP
Japan
Prior art keywords
movable
platen
drive
thrust bearing
position detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11504490U
Other languages
English (en)
Japanese (ja)
Other versions
JP2584196Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990115044U priority Critical patent/JP2584196Y2/ja
Publication of JPH0473434U publication Critical patent/JPH0473434U/ja
Application granted granted Critical
Publication of JP2584196Y2 publication Critical patent/JP2584196Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Positioning Apparatuses (AREA)
  • Machine Tool Units (AREA)
JP1990115044U 1990-10-31 1990-10-31 移動テーブル Expired - Fee Related JP2584196Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990115044U JP2584196Y2 (ja) 1990-10-31 1990-10-31 移動テーブル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990115044U JP2584196Y2 (ja) 1990-10-31 1990-10-31 移動テーブル

Publications (2)

Publication Number Publication Date
JPH0473434U true JPH0473434U (en]) 1992-06-26
JP2584196Y2 JP2584196Y2 (ja) 1998-10-30

Family

ID=31862778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990115044U Expired - Fee Related JP2584196Y2 (ja) 1990-10-31 1990-10-31 移動テーブル

Country Status (1)

Country Link
JP (1) JP2584196Y2 (en])

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012101332A (ja) * 2010-11-11 2012-05-31 Freebear Corp ワーク位置決めシステム
JP2016100531A (ja) * 2014-11-25 2016-05-30 日本精工株式会社 テーブル装置、位置決め装置、フラットパネルディスプレイ製造装置、及び精密機械
JP2016134457A (ja) * 2015-01-16 2016-07-25 東京エレクトロン株式会社 接合装置、接合システムおよび接合方法
JP2017126601A (ja) * 2016-01-12 2017-07-20 日本精工株式会社 テーブル装置、位置決め装置、フラットパネルディスプレイ製造装置、及び精密機械

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5750623A (en) * 1980-09-12 1982-03-25 Hitachi Ltd Spectral irradiation apparatus
JPS61230836A (ja) * 1985-03-29 1986-10-15 エヌ・ベー・フイリツプス・フルーイランペンフアブリケン 位置決め装置
JPS62123882U (en]) * 1986-01-31 1987-08-06
JPH04148528A (ja) * 1990-10-12 1992-05-21 Hitachi Ltd 試料位置決め装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5750623A (en) * 1980-09-12 1982-03-25 Hitachi Ltd Spectral irradiation apparatus
JPS61230836A (ja) * 1985-03-29 1986-10-15 エヌ・ベー・フイリツプス・フルーイランペンフアブリケン 位置決め装置
JPS62123882U (en]) * 1986-01-31 1987-08-06
JPH04148528A (ja) * 1990-10-12 1992-05-21 Hitachi Ltd 試料位置決め装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012101332A (ja) * 2010-11-11 2012-05-31 Freebear Corp ワーク位置決めシステム
JP2016100531A (ja) * 2014-11-25 2016-05-30 日本精工株式会社 テーブル装置、位置決め装置、フラットパネルディスプレイ製造装置、及び精密機械
JP2016134457A (ja) * 2015-01-16 2016-07-25 東京エレクトロン株式会社 接合装置、接合システムおよび接合方法
JP2017126601A (ja) * 2016-01-12 2017-07-20 日本精工株式会社 テーブル装置、位置決め装置、フラットパネルディスプレイ製造装置、及び精密機械

Also Published As

Publication number Publication date
JP2584196Y2 (ja) 1998-10-30

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